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Abstracts/Authors
Abstract Submission
Abstract Guidelines
Classification List
Selection Criteria
 Sample Abstract
 Sample Abstract
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Abstract Classification List
- Fabrication and Packaging Technologies
Deposition; growth; top down structuring (MEMS specific advances in lithography, etching, high aspect ratio technologies); bottom up structuring (nano imprinting, self-assembly, structured growth); surface modification; micro assembly; 3-D fabrication (including wafer bonding, bonding and interconnects); process integration; zero-level and/or wafer level packaging; wafer level functional testing.
- Materials and Device Characterization
Novel functional materials; MEMS materials under new operating conditions; measurement of material properties; calibration and compensation; failure analysis; degradation mechanisms and drift; reliability.
- Design, Simulation, and Theoretical Concepts with Experimental Verification
Synthesis and analysis methods; design techniques for devices and systems; CAD tools; modeling approaches with experimental verification; theoretical concepts in sensing; actuation and system integration.
- Mechanical Sensors and Systems
Sensors and systems for inertial forces (accelerometers, gyroscopes, shock sensors), pressure, force, stress; resonant sensors and systems; acoustic sensors and systems (including MEMS ultrasound systems).
- Physical MEMS (Optical, Thermal, Magneto)
Sensors and systems for electromagnetic quantities; optical sensors, MEMS based photonic systems, integrated optics (lenses); micro mirrors and MEMS displays; thermal devices and systems (including thermal flow sensors).
- RF MEMS
MEMS oscillators, filters (including BAWs, FBARs); switches; phase shifters; inductors and varactors; RF MEMS based systems (including integration of passives); wave-guides, antennas, MEMS micro wave components.
- Biomedical and Chemical Micro Sensors and Systems
Micro-total-analysis systems; implantable devices; drug delivery; micro-PCR systems; chemical and biochemical sensors and systems; MEMS based gas sensors.
- Micro-Fluidic Components and Systems
Microchannel gas and liquid flows; electrokinetics; mixing; two-phase flows; suspension flows, droplet and bubble dynamics; flow separation and vortex dynamics.
- Micro-Actuators
Pumps and valves; springs and grippers; motors; beam and membrane actuators; MEMS-based robotics.
- Energy and Power MEMS
Miniaturized fuel cells (including bio fuel cells); power generators (including micro electrothermal devices, mechanical / piezoelectric harvesters); microturbines; thrusters.
- Nano-Electro-Mechanical Devices and Systems
Carbon materials, carbon nanotubes, nanowires; molecular machinery, nanoactuators, nanorobots; nanoelectronic devices with sensing applications; nanostructure integration, interfaces and packaging.
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